Current Result Document :
ÇѱÛÁ¦¸ñ(Korean Title) |
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¿µ¹®Á¦¸ñ(English Title) |
A Study on the Deep Learning-Based Defect Prediction Model Using Sensor Data of Semiconductor Equipment |
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Seung-Jae Ha
Won-Suk Lee
Kyo-Yeon Gu
Yong-Tae Shin
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¿ø¹®¼ö·Ïó(Citation) |
VOL 28 NO. 01 PP. 0459 ~ 0462 (2021. 05) |
Çѱ۳»¿ë (Korean Abstract) |
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¿µ¹®³»¿ë (English Abstract) |
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